ELEN E4503

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Sensors, Actuators and Electromechanical Systems

  1. INTRODUCTION

  2. ENERGY STORAGE
    3. Interaction of fields and materials. Electric and magnetic energy. Circuit behavior of nonlinear electromagnetic devices.

  3. ENERGY LOSS
    4. High frequency losses and complex permitivity and permeability. Complete equivalent circuits of electromagnetic devices.

  4. ENERGY TRANSFER
    5. Ideal and non-ideal transformers. Equivalent circuits.

  5. DYNAMICS OF ELECTROMECHANICAL SYSTEMS
    6. Maxwell's equations for moving media. Effects of motion of polarizable, magnetizable and conductive media. Principle of virtual work and dynamical equations of electromechanical systems. Linearization of nonlinear dynamical equations.

  6. ELECTROMECHANICAL ACTUATORS
    7. Acoustic actuators: loudspeakers. Dynamical equations and equivalent circuits. Mechanical Actuators: Relays and stepper motors; Micromachines: IC processed electrostatic micromotors, deformable microstructures; piezoelectric actuators.

  7. ELECTROMECHANICAL SENSORS
    8. Acoustic sensors: electrodynamic and capacitive microphones, seismographs. Transduction function. Mechanical Sensors: pressure and acceleration sensors based on micromachined silicon cantilever beams integrated with piezoresistive or piezoelectric thin films. IC processed resonant micromechanical sensor structures.

  8. THERMOELECTRIC SENSORS
    9. Seebeck and Peltier effects: polysilicon thermopiles, bipolar transistor temperature sensor.

  9. ELECTRO-OPTIC SENSORS AND ACTUATORS
    10. Visible light sensors and actuators: photo diodes and transistors, reponsivity, quantum efficiency and signal to noise ratios. Optically controlled silicon microactuators. Infrared sensors: HgCdTe alloy and other direct bandgap semiconductors in photo diodes. X-ray sensors: p-i-n diodes of compound semiconductors.